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HomeSolid State PhenomenaSolid State Phenomena Vols. 51-52Growth and Electrical Properties of Reactively...

Growth and Electrical Properties of Reactively Sputtered WS_x Thin Films

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Polycrystalline Semiconductors IV

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Periodical:

Solid State Phenomena (Volumes 51-52)

Pages:

335-340

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.51-52.335

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Online since:

May 1996

Authors:

M. Regula, C. Ballif, F. Lévy

Keywords:

Sputtering, Sulfide, Tungsten

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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