Growth and Electrical Properties of Reactively Sputtered WSx Thin Films

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Periodical:

Solid State Phenomena (Volumes 51-52)

Edited by:

S. Pizzini, H.P. Strunk and J.H. Werner

Pages:

335-340

Citation:

M. Regula et al., "Growth and Electrical Properties of Reactively Sputtered WSx Thin Films", Solid State Phenomena, Vols. 51-52, pp. 335-340, 1996

Online since:

May 1996

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Price:

$38.00

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