The Effects of Implanted Arsenic on Ti-Silicide Formation

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Periodical:

Solid State Phenomena (Volume 71)

Edited by:

R.P. Agarwala

Pages:

147-172

DOI:

10.4028/www.scientific.net/SSP.71.147

Citation:

M. Milosavljević et al., "The Effects of Implanted Arsenic on Ti-Silicide Formation", Solid State Phenomena, Vol. 71, pp. 147-172, 2000

Online since:

October 1999

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$35.00

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