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HomeSolid State PhenomenaSolid State Phenomena Vols. 80-81Polysilicon Thin-Film Solar Cells: Influence of...

Polysilicon Thin-Film Solar Cells: Influence of the Deposition Rate upon Enhanced Diffusion and on Cell Performance

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Polycrystalline Semiconductors VI

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Periodical:

Solid State Phenomena (Volumes 80-81)

Pages:

269-274

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.80-81.269

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Online since:

November 2001

Authors:

G. Beaucarne, Matty Caymax, I. Peytier, Jef Poortmans

Keywords:

Chemical Vapor Deposition (CVD), Deposition Rate, Polycrystalline Silicon, Preferential Doping, Thin Film

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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