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HomeSolid State PhenomenaSolid State Phenomena Vols. 80-81Photoluminescence Features of Si/SiO2...

Photoluminescence Features of Si/SiO₂ Superlattices Produced by Reactive Magnetron Sputtering

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Abstract:

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Polycrystalline Semiconductors VI

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Periodical:

Solid State Phenomena (Volumes 80-81)

Pages:

249-256

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.80-81.249

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Online since:

November 2001

Authors:

C. Ternon, F. Gourbilleau, X. Portier, P. Voivenel, R. Madelon, Richard Rizk

Keywords:

Microstructure, Photoluminescence (PL), Reactive Magnetron Sputtering, Si/SiO₂ Superlattices

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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