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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Nucleation of Nanostructures from Surface Defects...

Nucleation of Nanostructures from Surface Defects on Silicon

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

687-694

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.687

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Online since:

November 2001

Authors:

V. Palermo, D. Jones

Keywords:

Defect, Nano-Fabrication, Oxide, Silicon

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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