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HomeSolid State PhenomenaSolid State Phenomena Vol. 93Defects in Polycrystalline Silicon Thin-Films...

Defects in Polycrystalline Silicon Thin-Films Crystallized by Solid Phase and Excimer Laser Annealing

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

161-166

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.161

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Online since:

June 2003

Authors:

Koichi Kitahara, K. Ohnishi, Y. Katoh, K. Watakabe, A. Moritani

Keywords:

Defect, Polycrystalline Silicon, Raman Spectroscopy, Thin Film Transistor

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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