New Method to Form High-Quality Poly-Si Film by Selectively Enlarging Laser Crystallization

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Periodical:

Solid State Phenomena (Volume 93)

Edited by:

T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner

Pages:

185-190

DOI:

10.4028/www.scientific.net/SSP.93.185

Citation:

M. Tai et al., "New Method to Form High-Quality Poly-Si Film by Selectively Enlarging Laser Crystallization", Solid State Phenomena, Vol. 93, pp. 185-190, 2003

Online since:

June 2003

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$35.00

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