Dislocation Generation in Device Fabrication Process

Abstract:

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

439-446

DOI:

10.4028/www.scientific.net/SSP.95-96.439

Citation:

I. Mica et al., "Dislocation Generation in Device Fabrication Process ", Solid State Phenomena, Vols. 95-96, pp. 439-446, 2004

Online since:

September 2003

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Price:

$35.00

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