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Preparation of stoichiometric TiNx films by laser CVD with metalorganic precursor Yansheng Gong1, a, Wei Zhou1, b, Rong Tu2, c and Takashi Goto2, d 1 School of Materials Science and Chemical Engineering, China University of Geosciences, Wuhan 430074, China 2 Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan agongyansheng@hotmail.com, bweizhou@cug.edu.cn, cturong@imr.tohoku.ac.jp, dgoto@imr.tohoku.ac.jp Key words: TiNx films, Stoichiometric, Composition, TDEAT-NH3, Laser CVD Abstract.
Nearly stoichiometric TiNx films were deposited on Al2O3 substrates by laser enhanced chemical vapor deposition (CVD) with tetrakis (diethylamido) titanium (TDEAT) and ammonia as the source materials.
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So the analysis of material characteristics is carried out.
The authors would like to thank National Natural Science Foundation of China.
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The COF measurements results showed that no matter footwear materials were treated or non-treated, the COF was higher than the standard suggested by ASTM (COF=0.5) under dry floor condition.
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The breach of tested materials (the LDPE material and material with nanofiller) were observed by digital microscope Keyence VHX-500 and are shown in Fig.6 and Fig.7.
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School of Material Science and Technology, University of Shanghai for Science and Technology, Shanghai, China; 2.
Experimental Materials.
Morphologies of the dispersion status of the composite materials.
Materials and Structures.
Journal of Materials Science: Materials in Medicine.