Books by Keyword: Rapid Thermal Annealing (RTA)

Description:

Selected, peer reviewed papers from the 2012 International Conference on Health, Structure, Material and Environment (HSME 2012), December 4-5, 2012, Shenzhen, China.
The 199 papers are grouped in to the following chapters:
Chapter 1: Structure, Building Materials and Constructions, Architecture and Civil Engineering Application;
Chapter 2: Advanced Material Science and Technology;
Chapter 3: Advanced Mechanical Engineering, Manufacturing, Industry and Heat Transfer Application;
Chapter 4: Environment and Ecology Technology, Sustainable Development of Energy.

Description: Engineering materials have long been challenges to, as well as the foundations of, industries and technologies. New technologies and new devices become available largely through the introduction of new materials or the improvement of existing materials.
Volume is indexed by Thomson Reuters CPCI-S (WoS).

Description: Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.

Description: This book covers the physics and technology of polycrystalline semiconductors by presenting the work of scientists who are concerned with a variety of polycrystalline materials in research, technology, and application, with a view to bridge the gap between fundamental and technological aspects of polycrystalline semiconductors.