Books by Keyword: Supercritical CO2

Books

Edited by: Dr. Paul W. Mertens, Marc Meuris and Marc Heyns
Online since: November 2007
Description: Volume is indexed by Thomson Reuters CPCI-S (WoS).
This collection of 86 peer-reviewed papers covers all aspects of the use of ultra-clean technology for large-scale integration on semiconductors, and cleaning and contamination-control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.
Edited by: Paul Mertens, Marc Meuris and Marc Heyns
Online since: April 2005
Description: Volume is indexed by Thomson Reuters CPCI-S (WoS).
This book is sub-divided into 10 different topical sections; each dealing with important issues in surface cleaning and preparation.
Showing 1 to 2 of 2 Books