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Ultra Clean Processing of Silicon Surfaces VII
Subtitle:
UCPSS 2004
Description:
Volume is indexed by Thomson Reuters CPCI-S (WoS).
This book is sub-divided into 10 different topical sections; each dealing with important issues in surface cleaning and preparation.
This book is sub-divided into 10 different topical sections; each dealing with important issues in surface cleaning and preparation.
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Info:
eBook:
ToC:
Editors:
Paul Mertens, Marc Meuris and Marc Heyns
THEMA:
TGM
BISAC:
TEC021000
Keywords:
Details:
Proceddings of the 7th International Symposium on Ultra Cleyn Processing of Silicon Surfaces (UCPSS), Brussels, Belgium, Sept. 20-22, 2004
Pages:
398
Year:
2005
ISBN-13 (softcover):
9783908451068
ISBN-13 (CD):
9783035719765
ISBN-13 (eBook):
9783038130253
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