Books by Keyword: Wet Etching

Books

Edited by: Dr. Pietro Vincenzini and Leandro Lorenzelli
Online since: September 2012
Description: The 15 peer-reviewed papers collected here together offer a plenitude of up-to-date information on “Next Generation Micro/Nano Systems”.
Volume is indexed by Thomson Reuters CPCI-S (WoS).
The papers are conveniently arranged into: Chapter 1: Physical, Chemical and Optical MEMS, Chapter 2: Radiofrequency MEMS, Chapter 3: Micro/Nano Fluidics.
Edited by: S.J. Pearton
Online since: December 1993
Description: State-of-the-art reviews on all the major areas of interest are brought together in this book, namely the role of hydrogen during epitaxial growth, its entry into the material during processing, its subsequent diffusivity and bonding with dopants, other impurities or defects, its effect on device performance and reliability and positive uses for hydrogen in passivating surfaces.
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