The characterisation of semiconductors is of key importance in preparing and applying semiconductors in industry.
Volume is indexed by Thomson Reuters CPCI-S (WoS).
The present work deals with theoretical and experimental topics which are related to the assessment of microstructures in semiconductors by means of beam injection and related methods.

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eBook:

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ToC:

Table of contents

Editors:

H. Tomokage and T. Sekiguchi

DOI:

https://doi.org/10.4028/b-OrG8Fc

THEMA:

TGM

BISAC:

TEC021000

Keywords:

Annealing, Cathodoluminescence, Defect, Diffusion Length, Dislocation, EBIC, Electron Beam Induced Current (EBIC), Scanning Electron Microscope (SEM), Semiconductor, Silicon

Pages:

522

Year:

2001

ISBN-13 (softcover):

9783908450610

ISBN-13 (CD):

9783035709209

ISBN-13 (eBook):

9783035707045

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