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Growth and Study of Thick 3C-SiC Epitaxial Layers Produced by Epitaxy on 6H-SiC Substrates

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Abstract:

3C-SiC epitaxial layers with a thickness of up to 100 μm and area of ~0.3-0.5 cm2 have been grown by sublimation epitaxy on hexagonal (6H-SiC) substrates at a maximum growth rate of about 200 μm per hour. The epilayers obtained are of n-type (Nd-Na ~ 1017 -1018 cm-3). According to X-ray data, the epitaxial layers are composed of the 3C-SiC polytype, without inclusions of other polytypes. The donor-acceptor (Al-N) recombination band with hνmax ~ 2.12 eV predominates in the photoluminescence (PL) spectrum. A detailed analysis of a PL spectrum measured at 6 K is presented. A conclusion is made that the epitaxial layers can be used as substrates for electronic devices based on 3C-SiC.

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Periodical:

Materials Science Forum (Volumes 556-557)

Pages:

175-178

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.556-557.175

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Online since:

September 2007

Authors:

Alexander A. Lebedev, V.V. Zelenin, Pavel L. Abramov, Elena V. Bogdanova, Sergey P. Lebedev, D.K. Nel'son, Boris S. Razbirin, M.P. Scheglov, Alla S. Tregubova, Mikael Syväjärvi, Rositza Yakimova

Keywords:

Heteroepitaxy, Photoluminescence (PL), Sublimation Epitaxy

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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