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Authors: R. Navamathavan, Anvar Zakirov, Hyun Seung Kim, Yong Jun Jang, An Soo Jung, Chi Kyu Choi
Abstract:Low dielectric constant SiOC(-H) films were deposited on p-type Si (100) substrates by plasma enhanced chemical vapor deposition (PECVD)...
239
Authors: Jun Hyung Lim, Seok Hern Jang, Seung Yi Lee, Kyung Min Yoon, Kyu Tae Kim, Jin Ho Joo, Hoo Jeong Lee, Hee Gyoun Lee, Gye Won Hong
Abstract:We fabricated by metal organic deposition (MOD) using trifluoroacetic acid (TFA) via the “211 process”, and then evaluated the phase...
243
Authors: Won Jun Lee, Min Ho Chun, Kwang Su Cheong, Kwang Chol Park, Chong Ook Park, Guo Zhong Cao, Sa Kyun Rha
Abstract:SiO2 films were prepared by atomic layer deposition (ALD) technique, and their physical and electrical properties were characterized for...
247
Authors: Sang Heon Lee
Abstract:Electro-deposition of carbon film on silicon substrate in methanol solution was carried out with various current density, solution...
251
Authors: Tae Woo Lee, Chan Soo Shin, Kae Myung Kang
Abstract:We have studied on the wear behavior of Cu-TiB2 composites, produced by thermal extraction, as a function of dispersed particle sizes and...
255
Authors: Jae Hong Jeon, Kang Woong Lee
Abstract:We investigated the effect of amorphous silicon pattern design regarding to light induced leakage current in amorphous silicon thin film...
259
Authors: Nam Hoon Kim, Gwon Woo Choi, Yong Jin Seo, Woo Sun Lee
Abstract:Indium tin oxide (ITO) CMP was performed by change of de-ionized water (DIW) temperature in pad conditioning process. DIW with high...
263
Authors: Nam Hoon Kim, Dong Myong Na, Pil Ju Ko, Jin Seong Park, Woo Sun Lee
Abstract:Chemical mechanical polishing (CMP) of platinum thin films was performed for the improvement of surface morphology. Platinum thin films...
267
Authors: Jong Hyeuk Lim, Kyong Nam Kim, Geun Young Yeom
Abstract:An internal linear inductive antenna referred to as “double comb-type antenna” was used for a large-area plasma source with the substrate...
271
Authors: Byoung Jae Park, Kyoung Seok Min, Sang Duk Park, Jeong Woon Bae, Oleksiy Vozniy, Geun Young Yeom
Abstract:The energy and the flux of the ion gun with a three-grid system was compared with those of the ion gun with a two-grid system and the...
275
Showing 61 to 70 of 461 Paper Titles