Paper Title
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Authors: Chan Ki Yang, Jin Goo Park, Jung Hun Jo, Geun Sik Lim, Tae Hyung Kim, In Soo Jo
Abstract:One of key processes in tungsten (W) CMP is to remove slurry particles inside W plug after CMP. In general, HF cleaning is well known to...
157
Authors: Seung Hwan Yi, Man Soon Yoon, Soon Chul Ur
Abstract:This paper describes a micromachined piezoelectric bimorph microphone, which is built on a low stress Parylene diaphragm with high quality...
161
Authors: Ju Yeoul Baek, Gu Han Kwon, Jeong Yun Kim, Jin Ho Cho, Seung Ha Lee, Kyung Sun, Sang Hoon Lee
Abstract:PDMS(polydimethylsiloxane) is a flexible and biocompatible material and is widely used in bio- or medical-related fields. Recently, PDMS has...
165
Authors: Jong Jin Choi, Joo Hee Jang, Dong Soo Park, Byung Dong Hahn, Woon Ha Yoon, Chan Park
Abstract:Lead zinc niobate (PZN) added lead zirconate titanate (PZT) thick films with thickness of 5~10 μm were fabricated on silicon and sapphire...
169
Authors: Dong Wan Kim, Kug Sun Hong
Abstract:For low temperature cofired ceramic (LTCC) materials to achieve increase functionality, as well as low loss and moderate dielectric...
173
Authors: Jang Sik Lee, Q.X. Jia
Abstract:To investigate the anisotropic dielectric properties of layer-structured bismuth-based ferroelectrics along different crystal directions, we...
177
Authors: Mikinori Ito, Kazuaki Sawada, Makoto Ishida
Abstract:Epitaxial Pt films were grown on γ-Al2O3/Si (111) substrate by RF-magnetron sputtering. The γ-Al2O3 buffer layers were grown epitaxially...
181
Authors: Jin Heong Yim, Young Kwon Park, Jong Ki Jeon
Abstract:The porous SSQ (silsesquioxane) films were prepared by using alkoxy silyl substituted cyclodextrin (sCD) and methyl substituted cyclodextrin...
185
Authors: Nam Ihn Cho, Se Jong Lee, Yo Seung Song, Deuk Yong Lee
189
Authors: Bum Rae Cho
Abstract:Indium tin oxide (ITO) used in many applications such as electronic and optical devices were deposited on the soda lime glass substrate by...
195
Showing 41 to 50 of 461 Paper Titles