Gettering and Defect Engineering in Semiconductor Technology XIII
Solid State Phenomena Volumes 156 - 158
doi:10.4028/www.scientific.net/SSP.156-158
-
p95
Growth of Heavily Phosphorus-Doped (111) Silicon Crystals
[
570 K
]
Authors: Feng Liu, Huan Peng Han, Yi Meng Wang, Li Ying Tong
-
p101
Semi-Insulating Silicon for Microwave Devices
[
368 K
]
Authors: Douglas M. Jordan, Kanad Mallik, Robert J. Falster, Peter R. Wilshaw
-
p107
Can Impurities be Beneficial to Photovoltaics?
[
534 K
]
Authors: Antonio Luque, Antonio Martí
-
p115
Properties of Fast-Diffusing Oxygen Species in Silicon Deduced from the Generation Kinetics of Thermal Donors
[
216 K
]
Authors: Vladimir V. Voronkov, G.I. Voronkova, A.V. Batunina, V.N. Golovina, Robert J. Falster, M. Cornara, N.B. Tiurina, A.S. Guliaeva
-
p123
The Production of Vacancy-Oxygen Defects in Electron-Irradiated Cz-Si Initially Treated at High Temperatures and High Pressures
[
252 K
]
Authors: A. Andrianakis, Charalamos A. Londos, Andrzej Misiuk, Valentin V. Emtsev, Gagik A. Oganesyan, H. Ohyama
-
p129
Divacancy-Oxygen and Trivacancy-Oxygen Complexes in Silicon: Local Vibrational Mode Studies
[
276 K
]
Authors: L.I. Murin, Bengt G. Svensson, J. Lennart Lindström, Vladimir P. Markevich, Charalamos A. Londos
-
p135
Low-Temperature Elastic Softening due to Vacancies in Boron-Doped FZ Silicon Crystals
[
134 K
]
Authors: Hiroshi Yamada Kaneta, Hajime Watanabe, Yuta Nagai, Shotaro Baba, Mitsuhiro Akatsu, Yuichi Nemoto, Terutaka Goto
-
p139
Vacancies and Self-Interstitials Dynamics in Silicon Wafers
[
387 K
]
Authors: O. Caha, J. Kuběna, A. Kuběna, M. Meduňa
-
p145
Interaction of Point Defects with Impurities in the Si-SiO2 System and its Influence on the Properties of the Interface
[
538 K
]
Authors: Daniel Kropman, E. Mellikov, K. Lott, Tiit Kärner, Ivo Heinmaa, Tony Laas, Arthur Medvid, Wolfgang Skorupa, S. Prucnal, S. Zvyagin, E. Cizmar, M. Ozerov, J. Woznitsa
-
p149
Anomalous Out-Diffusion Profiles of Nitrogen in Silicon
[
191 K
]
Authors: Vladimir V. Voronkov, Robert J. Falster, Semih Senkader
-
p155
DLTS Studies of Carbon Related Complexes in Irradiated N- and P-Silicon
[
241 K
]
Authors: L.F. Makarenko, F.P. Korshunov, Stanislav B. Lastovskii, L.I. Murin, Michael Moll
-
p161
Copper In-Depth Distribution in Hydrogen Implanted Cz Si Wafers Subjected to Two-Step Annealing
[
776 K
]
Authors: A.V. Frantskevich, A.K. Fedotov, A.V. Mazanik, N.V. Frantskevich
-
p167
Radiation Defects in Silicon: Effect of Contamination by Platinum Atoms
[
285 K
]
Authors: Pavel Hazdra, Volodymyr V. Komarnitskyy
-
p173
Review of Stress Effects on Dopant Solubility in Silicon and Silicon-Germanium Layers
[
284 K
]
Authors: Nicholas S. Bennett, Chihak Ahn, Nicholas E.B. Cowern, Peter Pichler
-
p181
Oxygen Diffusion in Si1-xGex Alloys
[
97 K
]
Authors: Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin, A.V. Duvanskii, S.K. Golyk, Nikolay V. Abrosimov, H. Riemann