Gettering and Defect Engineering in Semiconductor Technology
Solid State Phenomena Volumes 32 - 33
doi:10.4028/www.scientific.net/SSP.32-33
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p117
Reduction of Interfacial Carbon and Boron Contamination as Sources for Degradation of Epitaxial SiGe Layers Grown by MBE
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272 K
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Authors: H.P. Zeindl, G. Lippert, J. Drews, R. Kurps, H.J. Osten
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p123
Misfit Strain Engineering in Heteroepitaxial Structures
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320 K
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Authors: Hans Richter, A. Fischer, H. Kühne, M. Eichler
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p129
Surfactant-Mediated MBE of Strained-Layer III-V Semiconductor Heterostructures
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661 K
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Authors: K. Ploog, E. Tournié
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p141
Transition Metal Gettering in Poly-Silicon for Photovoltaic Applications (Abstract)
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42 K
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Authors: Eicke R. Weber, J. Bailey
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p143
Properties of Hydrogen, Oxygen and Carbon in Si
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533 K
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Authors: A.L. Endrös
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p155
Solubility of Hydrogen in Silicon at High Temperatures
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261 K
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Authors: R.C. Newman, M.J. Binns, S.A. McQuaid, Edward C. Lightowlers
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p161
Effect of Oxygen Concentration on the Kinetics of Oxygen Loss and Thermal Donor Formation in Silicon at Temperatures between 350° C and 500° C
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234 K
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Authors: Charalamos A. Londos, S.A. McQuaid, M.J. Binns, R.C. Newman, J.H. Tucker
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p167
Evolution of Oxygen Clusters and Agglomerates in Annealed Cz-Si at High Pressure - High Temperature
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301 K
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Authors: Andrzej Misiuk, J. Adamczewska, Jadwiga Bak-Misiuk, Josh Wolf
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p173
Peculiarities in the Defect Behavior in Heat-Treated Cz-Si with a Low and High Oxygen Content
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291 K
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Authors: Valentin V. Emtsev, Gagik A. Oganesyan, K. Schmalz
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p181
New Evidences about Carbon and Oxygen Segregation Processes in Polycrystalline Silicon
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502 K
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Authors: Simona Binetti, Sandro Ferrari, Maurizio Acciarri, S. Acerboni, R. Canteri, Sergio Pizzini
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p191
Oxygen and Copper Precipitation at the Silicon/Silicon Dioxide Interface
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422 K
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Authors: A. Correia, J.L. Maurice, A. Boutry-Forveille, D. Ballutaud
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p197
The Role of Oxygen for Defect Formation in Oxygen-Rich Si- and Si1-xGex - Layers on Silicon Grown by APCVD
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406 K
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Authors: D. Krüger, Th. Morgenstern, R. Kurps, Ch. Quick
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p203
Annealing Properties of N-Doped Cz-Si Crystals
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138 K
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Authors: Chin Sheng Chen, Fu Long Dai, H.J. Ye, Y.C. Huang, De Ren Yang, H.N. Yao
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p207
Oxygen-Related Clusters of Platinum in Silicon - an Electron Spin Resonance Study
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204 K
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Authors: M. Höhne, U. Juda
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p213
Formation and Properties of Tetranuclear Clusters of Manganese in Silicon
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256 K
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Authors: J. Kreissl, W. Gehlhoff