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Gettering and Defect Engineering in Semiconductor Technology

Solid State Phenomena Volumes 32 - 33

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• p219 EPR Identification of the Different Charge States of the Iron-Acceptor Pairs in Silicon   [ 309 K ]
  Authors: W. Gehlhoff, K. Irmscher
• p225 Investigation of Deep Levels and Carrier Dynamics in SiC Films   [ 207 K ]
  Authors: M. Petrauskas, V. Bikbayev, R. Tomasiunas, Magnus Willander, Qamar-ul Wahab
• p231 Process-Induced Defects in Silicon Technology   [ 876 K ]
  Authors: Bernd O. Kolbesen, M. Dellith, R. Booker, Hans Cerva, F. Gelsdorf, Werner Bergholz
• p247 Lattice Defects Induced in Si_1-xGe_x Diodes by 1-MeV Electron Irradiation and their Influence on Electrical Characteristics   [ 239 K ]
  Authors: H. Ohyama, Jan Vanhellemont, Jef Poortmans, Matty Caymax, Paul Clauws
• p253 Non-Equilibrium Impurity Diffusion in Silicon and Silicon Carbide   [ 249 K ]
  Authors: N.T. Bagraev, E.I. Chaikina, L.E. Klyachkin
• p259 Dopant Migration Caused by Point Defect Gradients   [ 391 K ]
  Authors: P. Pichler, S. List
• p269 Vacancy Assisted Diffusion of Si in GaAs: Microscopic Theory   [ 199 K ]
  Authors: Jaroslaw Dąbrowski, J. Northrup
• p273 Investigation of Defect Generation and Precipitation in Antimony Implanted Silicon   [ 240 K ]
  Authors: D. Krüger, R. Kurps, P. Zaumseil
• p279 Electric-Dipole Spin Resonance on Extended Defects in Silicon   [ 607 K ]
  Authors: Vitaly V. Kveder
• p291 Luminescence of Dislocations in SiGe/Si Structures   [ 750 K ]
  Authors: V. Higgs
• p303 On the Nature of Dislocation Luminescence in Si and Ge   [ 262 K ]
  Authors: E.A. Steinman
• p309 Defect Electrical Activity Study Using a Si(Ge) Heteroepitaxial Structure   [ 498 K ]
  Authors: Zbigniew J. Radzimski, A. Buczkowski, George A. Rozgonyi
• p319 Properties of Dislocations and Point Defects in Fz-Si   [ 408 K ]
  Authors: Daniela Cavalcoli, Anna Cavallini, E. Gombia, Manfred Reiche
• p325 Metastable States Associated with Interfacial MISFIT Dislocations in Si/Si(Ge) Heterostructures   [ 417 K ]
  Authors: Sergei V. Koveshnikov, Anant K. Agarwal, George A. Rozgonyi
• p333 Experimental Study of Anomalous Dislocation Kinks Drift in Germanium Single Crystals   [ 242 K ]
  Authors: Yu.L. Iunin, V.I. Nikitenko, Valeri I. Orlov, B.V. Petukhov