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Gettering and Defect Engineering in Semiconductor Technology

Solid State Phenomena Volumes 32 - 33

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• p339 Cu Precipitation in Strained and Relaxing Ge_xSi_1-x Heteroepitaxial Layers   [ 283 K ]
  Authors: G. Kissinger, G. Morgenstern, Hans Richter
• p345 Peculiarities of Defect Formation in SiGe/Si and SiGe/Ge Heterostructures   [ 373 K ]
  Authors: V.I. Vdovin, M.G. Mil'vidskii, T.G. Yugova
• p353 The Influence of Oxidation Induced Stacking Faults on Electrical Parameters of a CCD Device   [ 249 K ]
  Authors: P. Schley, G. Kissinger, R. Barth, K.-E. Ehwald
• p359 Metals, Oxide Precipitates and Minority Carrier Lifetime in Silicon   [ 96 K ]
  Authors: Robert J. Falster, D. Gambaro
• p361 UHV-VLPCVD Heteroepitaxial Growth of Thin SiGe-Layers on Si-Substrates: Influence of Pressure on Kinetics and on Surface-Morphology   [ 770 K ]
  Authors: Matty Caymax, Jef Poortmans, A. Van Ammel
• p373 Formation of High Quality SiGe/Si Heterostructures   [ 433 K ]
  Authors: Y. Shiraki, S. Fukatsu, K. Fujita, T. Usami, D.K. Nayak, H. Sunamura, R. Ito
• p385 Liquid Phase Epitaxy of SiGe Structures   [ 754 K ]
  Authors: E. Bauser, P.O. Hansson, M. Albrecht, Horst P. Strunk, Allen Gustafson
• p397 Planar Defects and Misfit Dislocations in (001) GaAs/Ge Heterostructures MOCVD Grown with Different V/III Ratio   [ 627 K ]
  Authors: C. Frigeri, Giovanni Attolini, C. Pelosi, Aldo Armigliato
• p403 Solvents Influencing the Morphology of Epitaxial Solution-Grown Strained Ge/Si Layers   [ 389 K ]
  Authors: P.O. Hansson, E. Bauser, M. Albrecht, Horst P. Strunk
• p409 Deposition and P Doping of Si_(1-x)Ge_x Layers in a Conventional Horizontal Tube APCVD Reactor without Load Lock System   [ 323 K ]
  Authors: Th. Morgenstern, I. Babanskaya, G. Morgenstern, K. Schmalz, P. Gaworzewski, P. Zaumseil, D. Krüger, K. Tittelbach-Helmrich, H. Kühne
• p417 Misfit Dislocations in Strained Layer Epitaxy   [ 822 K ]
  Authors: R. Hull, J.C. Bean, R.A. Logan
• p433 Stress Relaxation Mechanisms by Dislocations in the System Ge on Si   [ 689 K ]
  Authors: M. Albrecht, S. Christiansen, Horst P. Strunk, P.O. Hansson, E. Bauser
• p445 Strain Relaxation and Threading Dislocation Density in Lattice-Mismatched Semiconductor Systems   [ 241 K ]
  Authors: H.-H. Wehmann, G.-P. Tang, A. Schlachetzki
• p451 Relaxation Phenomena in Strained Si_1-xGe_x Layers on Planar and Differently Patterned Si Substrates   [ 499 K ]
  Authors: E. Bugiel, P. Zaumseil, B. Dietrich, H.J. Osten
• p457 Equilibrium Configuration of Misfit Dislocations in Graded Buffers   [ 184 K ]
  Authors: G. Span, G. Heigl, Erich Kasper