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Papers by Author: Takaya Ohno

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Fabrication of Mesa-Type pn Diodes without Forward Degradation on Ultra-High-Quality 6H-SiC Substrate

Authors: Yasunori Tanaka, Takaya Ohno, Naoki Oyanagi, Shin Ichi Nishizawa, Takaya Suzuki, Kenji Fukuda, Tsutomu Yatsuo, Kazuo Arai

1009

Large Diameter and Long Length Growth of SiC Single Crystal

Authors: Tomohisa Kato, Takaya Ohno, Fusao Hirose, Naoki Oyanagi, Shin Ichi Nishizawa, Kazuo Arai

Influence of Stacking Faults on the I-V Characteristics of 4H-SiC Schottky Barrier Diodes Fabricated on the (11-20) Face

Authors: Kazutoshi Kojima, Takaya Ohno, Tatsuo Fujimoto, Masakazu Katsuno, Noboru Ohtani, Johji Nishio, Yuuki Ishida, Tetsuo Takahashi, Takaya Suzuki, Tomoyuki Tanaka, Kazuo Arai

925

Characterization of the Forward Conduction of 4H-SiC Planar Junction Diode

Authors: Toshiyuki Ohno, Takaya Ohno, Kensuke Amemiya, Atsuo Watanabe

835

Epitaxial Growth of (11-20) 4H-SiC Using Substrate Grown in the [11-20] Direction

Authors: Kazutoshi Kojima, Takaya Ohno, Junji Senzaki, Kenji Fukuda, Tatsuo Fujimoto, Masakazu Katsuno, Noboru Ohtani, Johji Nishio, Koh Masahara, Yuuki Ishida, Tetsuo Takahashi, Takaya Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai

195

High-Rate Epitaxial Growth of 4H-SiC Using a Vertical-Type, Quasi-Hot-Wall CVD Reactor

Authors: Koh Masahara, Tetsuo Takahashi, Mitsuhiro Kushibe, Takaya Ohno, Johji Nishio, Kazutoshi Kojima, Yuuki Ishida, Takaya Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai

179

Secondary Defect Distribution in High Energy Ion Implanted 4H-SiC

Authors: Takaya Ohno, Naoto Kobayashi

913

Pre-Growth Treatment of 4H-SiC Substrates by Hydrogen Etching at Low Pressure

Authors: Koh Masahara, Yuuki Ishida, Hajime Okumura, Tetsuo Takahashi, Mitsuhiro Kushibe, Takaya Ohno, Takahito Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai

1037

Competitive Growth between Deposition and Etching in 4H-SiC CVD Epitaxy Using Quasi-Hot Wall Reactor

Authors: Mitsuhiro Kushibe, Yuuki Ishida, Hajime Okumura, Tetsuo Takahashi, Koh Masahara, Takaya Ohno, Takahito Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai

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