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Articles by author: Wolfgang R. Fahrner

• µ-Raman Investigations on Hydrogen Gettering in Hydrogen Implanted and Hydrogen Plasma Treated Czochralski Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p91)
• Depth Resolved Defect Analysis by Micro-Raman Investigations of Plasma Hydrogenated Czochralski Silicon Wafers
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p141)
• DLTS Study on Deep Levels Formed in Plasma Hydrogenated and Subsequently Annealed Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p547)
• Electrical Characterization of Buried Layers in Silicon
  Published in: Ion Implantation in Semiconductors (p85)
• Evolution of Hydrogen Related Defects in Plasma Hydrogenated Crystalline Silicon under Thermal and Laser Annealing
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p211)
• Hydrogen Redistribution and Void Formation in Hydrogen Plasma Treated Czochralski Silicon
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p315)
• Low-Temperature Doping of P-Type Czochralski Silicon due to Hydrogen Plasma Enhanced Thermal Donor Formation
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p189)
• Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p91)
• Raman Spectroscopic Analysis of Hydrogen Plasma Treated Czochralski Silicon
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p139)
• Rapid Low Temperature Diode Fabrication on P-Type Czochralski Silicon on the Base of Simple Hydrogen Enhanced Thermal Donor Formation Processes
  Published in: Gettering and Defect Engineering in Semiconductor Technology VIII (p551)
• The Influence of Low-Energy Argon Implantation and Out-Diffusion Heat Treatments on Hydrogen Enhanced Thermal Donor Formation in P-Type Czochralski Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology VIII (p409)