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Articles by keyword: «Defect Passivation»

• An Experimental Study of Ion Beam and ECR Hydrogenation of Self-Ion Implantation Damage in Silicon by Admittance Spectroscopy and X-Ray Triple Crystal Diffractometry
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p483)
• Defect Control Process Technologies for High-Performance Polycrystalline Si Thin-Film Transistor Fabrication
  Published in: Polycrystalline Semiconductors VII (p49)
• Effect of Al₂O₃ Deposition and Subsequent Annealing on Passivation of Defects in Ge-Rich SiGe-on-Insulator
  Published in: Technology Evolution for Silicon Nano-Electronics (p79)
• Hydrogen Stimulated Destruction of Fe-B Pairs in p-Si
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p383)
• Hydrogen-Enhanced Transformation of Eletrical and Structural Properties of Thin Subsurface Ion Implanted Silicon Layer in SiO₂-Si Systems
  Published in: Gettering and Defect Engineering in Semiconductor Technology VIII (p595)
• Impact of a Treatment Combining Nitrogen Plasma Exposure and Forming Gas Annealing on Defect Passivation of SiO₂/SiC Interfaces
  Published in: Silicon Carbide and Related Materials 2008 (p525)
• Improved Electrical Properties of SiC-MOS Interfaces by Thermal Oxidation of Plasma Nitrided 4H-SiC(0001) Surfaces
  Published in: Silicon Carbide and Related Materials 2009 (p507)
• Polycrystalline Silicon Thin-Film Transistors Fabricated by Defect Reduction Methods
  Published in: Polycrystalline Semiconductors VII (p37)