Fabrication of High Aspect Ratio SU-8 Microstructures on Piezoelectric Transducers

N. Ramakrishnan; Harshal B. Nemade; Roy Paily Palathinkal

doi:10.4028/www.scientific.net/AMM.110-116.3127

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 110-116Fabrication of High Aspect Ratio SU-8...

Fabrication of High Aspect Ratio SU-8 Microstructures on Piezoelectric Transducers

Abstract:

A methodology to fabricate high aspect ratio (HAR) SU-8 micro structures on piezoelectric and metallic substrates is presented. In this work, several fabrication trials were carried out to optimize the SU-8 fabrication process. The fabrication recipe mentioned in the SU-8 (Microchem, USA) datasheet is employed for the initial fabrication trials. The SU-8 structures (micropillars) fabricated during these trials resulted in poor bonding with the surface of piezoelectric substrate. In the later trials a thin film of OmniCoat (Microchem, USA) is coated over the substrate before coating the SU-8 film to improve the adhesion quality of the SU-8 micropillars to the substrate. The fabrication methodology used during the trails and results on the quality of the fabricated HAR SU-8 pillars are discussed in the paper.

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Periodical:

Applied Mechanics and Materials (Volumes 110-116)

Pages:

3127-3131

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.110-116.3127

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Online since:

October 2011

Authors:

N. Ramakrishnan, Harshal B. Nemade, Roy Paily Palathinkal

Keywords:

Micro-Electromechanical System (MEMS), Piezoelectric Transducers, SAW Devices, SU-8 Fabrication

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