Design and Analysis of Ultra-Low Speed Movement Equipment System

Feng Yan Dai; Wen Gang Ji; Jian Shu Cao

doi:10.4028/www.scientific.net/AMM.130-134.1475

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The Evolution of Free Electron Density during the Interaction between Femtosecond Pulse and Lithium Niobate Crystal
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The Pulverization and its Dynamic Model of Waste Thermosetting Phenol-Formaldehyde Resins
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Design and Analysis of Ultra-Low Speed Movement Equipment System
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Effect of Supports on Stress Distributions in the Adhesive Joints
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 130-134Design and Analysis of Ultra-Low Speed Movement...

Design and Analysis of Ultra-Low Speed Movement Equipment System

Abstract:

Czochralski lifting device is the key equipment for crystal growth. Due to laser crystal growth mechanism could decide its slow growth speed, so Lifting device is required to operate under the ultra-low speed situation chronically. According to shock, shake, fraction and crawl of movement system affected speed stability, the paper carries out a nobel design to laser Czochralski lifting system through alternated servo technology and its precision is analyzed comprenshensively. The long-term experimental data showed by using changed plus PID control method that the system has high precision and better reliability and it is suitable to grow large-size laser crystal. Meanwhile, the design system makes use of common spare parts and can meet the requirements for large scale industrialization.

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Periodical:

Applied Mechanics and Materials (Volumes 130-134)

Pages:

1475-1479

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.130-134.1475

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Online since:

October 2011

Authors:

Feng Yan Dai, Wen Gang Ji, Jian Shu Cao

Keywords:

Czochralski, Lifting Method, Lifting System, Servo Driver, Ultra-Low Speed

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References

[1] LiLiu-chen, Feng Kui. Status and development of silicon crystal growth equipment [J]. Equipment for Electronic Products Manufacturing, 2007, 36(3): 5-7.

Google Scholar

[2] Liu Qin-xian, Chen Xiang-hua. Design and Analysis of Speed Control System for Single-crystal Furnace Lifting Mechanism [J]. Micromotors. servo Technique , 2001, 34(3): 53-55.

Google Scholar

[3] Gao Li-qiang. Review of the Mechanical Transmission System of the Single Crystal Growth Furnace [J]. Journal of Mechanical Transmission, 2005, 29(6): 75-79.

Google Scholar

[4] Yang jun-liang, Liu Xiao-yun, Liu Yun-xia. Design of Czochralski device for large laser crystal growth furnace [J]. Equipment for Electronic Products Manufacturing, 1999, 28(3): 35-38.

Google Scholar

[5] Sun Jian-long. AC servo system application on the single crystal Furnace [J]. Jiangsu Metallurgy，2006, 34(3): 43.

Google Scholar

[6] Mechanical Design Handbook Editorial Board. Mechanical Design Handbook (Volume 2) [M]. Beijing: China Machine Press， (2004).

Google Scholar

[7] Ji Wen-gang, Lin-li, Dai Feng-yan. A study of a crystal growth control system based on Modbus-TCP [J]. Industrial Instrumentation & Automation, 2008, 38(5): 3-5.

Google Scholar