Design and Analysis of Ultra-Low Speed Movement Equipment System
Czochralski lifting device is the key equipment for crystal growth. Due to laser crystal growth mechanism could decide its slow growth speed, so Lifting device is required to operate under the ultra-low speed situation chronically. According to shock, shake, fraction and crawl of movement system affected speed stability, the paper carries out a nobel design to laser Czochralski lifting system through alternated servo technology and its precision is analyzed comprenshensively. The long-term experimental data showed by using changed plus PID control method that the system has high precision and better reliability and it is suitable to grow large-size laser crystal. Meanwhile, the design system makes use of common spare parts and can meet the requirements for large scale industrialization.
F. Y. Dai et al., "Design and Analysis of Ultra-Low Speed Movement Equipment System", Applied Mechanics and Materials, Vols. 130-134, pp. 1475-1479, 2012