Vibration Analysis of a Micromachined Modal Gyroscope Based on Elastic Body
Micromachined modal gyroscope based on elastic body (MMGEB) is a novel kind of rotating rate sensor, which has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. In this paper, the model and working mechanism of MMGEB are proposed first. The modal analysis, the harmonic analysis and Coriolis analysis for the model by the finite element method (FEM) have been conducted. The research in the paper provides theoretical foundation for realizing this micromachined gyroscope.
Z. Wang et al., "Vibration Analysis of a Micromachined Modal Gyroscope Based on Elastic Body", Applied Mechanics and Materials, Vols. 130-134, pp. 4236-4239, 2012