Vibration Analysis of a Micromachined Modal Gyroscope Based on Elastic Body

Zheng Wang; Xiao Sheng Wu; Xiao Jun Hu; Wen Yuan Chen; Wei Ping Zhang

doi:10.4028/www.scientific.net/AMM.130-134.4236

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 130-134Vibration Analysis of a Micromachined Modal...

Vibration Analysis of a Micromachined Modal Gyroscope Based on Elastic Body

Abstract:

Micromachined modal gyroscope based on elastic body (MMGEB) is a novel kind of rotating rate sensor, which has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. In this paper, the model and working mechanism of MMGEB are proposed first. The modal analysis, the harmonic analysis and Coriolis analysis for the model by the finite element method (FEM) have been conducted. The research in the paper provides theoretical foundation for realizing this micromachined gyroscope.

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Periodical:

Applied Mechanics and Materials (Volumes 130-134)

Pages:

4236-4239

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.130-134.4236

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Online since:

October 2011

Authors:

Zheng Wang, Xiao Sheng Wu, Xiao Jun Hu, Wen Yuan Chen, Wei Ping Zhang

Keywords:

Coriolis, Gyroscope, Harmonic, Micro Machined, Modal

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