Fabrication of Micro Cylindrical Electrode with Flat End Shape and its Application in Electrochemical Micromachining

Yong Liu

doi:10.4028/www.scientific.net/AMM.364.244

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 364Fabrication of Micro Cylindrical Electrode with...

Fabrication of Micro Cylindrical Electrode with Flat End Shape and its Application in Electrochemical Micromachining

Abstract:

Electrochemical micromachining (EMM) has become more and more important in micro machining in recent years. Micro electrode as the tool of EMM is an essential cell in the machining process. In this study, micro cylindrical electrode is fabricated by electrochemical etching firstly. Second, the flat end shape forming methods for micro cylindrical electrode is investigated. And then, micro electrodes with flat end shape fabricated above is used in electrochemical micro milling process. Finally, a 3D micro structure with three steps is machined on metallic materials by above micro cylindrical electrode with flat end shape.

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Periodical:

Applied Mechanics and Materials (Volume 364)

Pages:

244-247

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.364.244

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Online since:

August 2013

Authors:

Yong Liu

Keywords:

3D Micro Structure, Electrochemical Etching, Electrochemical Micromachining, END SHAPE, Micro Cylindrical Electrode

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