In Situ Measurement of Elastic Modulus of Individual Layers for Composite Thin Films by MEMS Test Structures

Abstract:

In this paper, a direct and simple method to characterize the elastic modulus of individual layers for composite films by in situ measuring of MEMS test structures is presented. The structure is composed of a set of microactuators which contains a rigid plate with two supporting composite beams. A model is developed to describe analytically the relationship between the force and the deflection of microactuators by electrostatic measurements, and the elastic modulus of multi-layered beams with different widths are evaluated. FEM simulations are implemented to validate the accuracy of the relationship between the on-load voltage and the capacitance between the microactuator and the electrode on the substrate. Test structures are fabricated using CMOS-MEMS process and experiments are to be carried out soon.

• Periodical: Applied Mechanics and Materials (Volume 364)
• Pages: 248-252
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.364.248
• Online since: August 2013
• Authors: Chao Sun, Zai Fa Zhou, Wei Hua Li, Qing An Huang
• Keywords: Composite Thin Films, Elastic Modulus, In Situ Measurement, MEMS, Test Structures

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