The Position Plane Distortion Study of 2-DOF Precision Position Table

Abstract:

A new 2-DOF precision positioning table of high speed and accuracy, directly driven by voice coil actuator, is put forward. And a novel elastic decoupling mechanism is introduced in the table. In order to study its dynamic characteristic when the table works at high speed and high acceleration, the table FEA model is built and the FEA is carried out. Based on the FEA results, the position planes displacement on X, Y and Z axis of the 2-DOF table is simulated respectively, the simulation results can provide reference for the table dynamic structural design.

• Periodical: Applied Mechanics and Materials (Volume 364)
• Pages: 267-271
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.364.267
• Online since: August 2013
• Authors: Xiao Mei Feng, Li Shun Li, Zhan Dong Liu, Da Wei Zhang
• Keywords: Distortion, FEA Model, Position Plane, Positioning Table

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