Preparation and Hydrophobic Processing of Aluminum-Doped Zinc Oxide Films

Chen Li; Min Li; Du Yao Zhang

doi:10.4028/www.scientific.net/AMM.39.44

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 39Preparation and Hydrophobic Processing of...

Preparation and Hydrophobic Processing of Aluminum-Doped Zinc Oxide Films

Abstract:

In this research, transparent and conductive aluminum-doped zinc oxide (AZO) films were prepared on glass substrates by metal-organic chemical vapor deposition (MOCVD). A nanostructured hydrophobic layer of fluorocarbon (FC) compounds was formed on the films by low-temperature dielectric barrier discharge plasma enhanced chemical vapor deposition (DBD-PECVD), as hydrophobic processing. Scanning electron microscopy (SEM) and contact angle analyzer were used to characterize and analyze the surface morphology, structure and hydrophobicity of these samples. The results indicate that the hydrophobicity of transparent conductive AZO films was enhanced by the deposition of the FC film.

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Periodical:

Applied Mechanics and Materials (Volume 39)

Pages:

44-49

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.39.44

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Online since:

November 2010

Authors:

Chen Li, Min Li, Du Yao Zhang

Keywords:

AZO Film, DBD-PECVD, FC Film, Hydrophobicity, MOCVD

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