Temperature Effect on Mechanical Properties of Aluminum Film

Shiuh Chuan Her; Yi Hsiang Wang

doi:10.4028/www.scientific.net/AMM.479-480.96

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 479-480Temperature Effect on Mechanical Properties of...

Temperature Effect on Mechanical Properties of Aluminum Film

Abstract:

Aluminum films were prepared on the glass substrate by electron-beam vapor deposition. Nanoindentation tests were employed to determine the hardness and Youngs modulus of the Al film. The effect of substrate temperature on the mechanical properties of the Al film was investigated. Experimental results show that the hardness of Al film is increasing with the increase of the substrate temperature. It can also be observed that the Youngs modulus of Al film doesnt significantly depend on the substrate temperature.

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Periodical:

Applied Mechanics and Materials (Volumes 479-480)

Pages:

96-99

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.479-480.96

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Online since:

December 2013

Authors:

Shiuh Chuan Her, Yi Hsiang Wang

Keywords:

Aluminum Film, Electron-Beam Vapor Deposition, Nanoindentation Test

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