BaxSr1-x TiO3 Different Thickness Analysis Using Sol Gel Approach

Nurhafizah Ramli; Zaliman Sauli; Vithyacharan Retnasamy; They Yee Chin; K. Anwar; Nooraihan Abdullah

doi:10.4028/www.scientific.net/AMM.487.29

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 487BaxSr1-x TiO3 Different Thickness Analysis Using...

Ba_xSr_1-x TiO₃ Different Thickness Analysis Using Sol Gel Approach

Abstract:

Barium Strontium Titanate (BST) a common topic in the microelectronic field for many devices which is mainly on dynamic random access memories (DRAM). There are many methods of preparing Ba_xSr_1-xTiO_3;barium strontium titanate. In this work, sol-gel method was used as it has some advantages like better homogeneity, lower cost, lower processing temperature and easier fabrication. Ba_xSr_1-xTiO₃solution was deposited on the silicon substrate of 4 different thicknesses with different ratio of the concentration of Barium (Ba). The thickness of the thin film has a linear increase as the Ba content increases.

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Periodical:

Applied Mechanics and Materials (Volume 487)

Pages:

29-32

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.487.29

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Online since:

January 2014

Authors:

Nurhafizah Ramli, Zaliman Sauli*, Vithyacharan Retnasamy, They Yee Chin, K. Anwar, Nooraihan Abdullah

Keywords:

Barium Strontium Titanate (BST), Film Thickness

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