Composition Study of Amorphous InxAs1-x Films Prepared by Radio-Frequency Sputtering

Abstract:

Article Preview

Amorphous InAs films are deposited on substrates of quartz glass by RF magnetron sputtering technique in different gas ambient. We present a systematic study of the affects of the sputtering parameters on the chemical composition. Amorphous InAs (a-InAs) films have been achieved at higher working pressure when the substrate temperature and RF power are increased respectively. The films composition is controlled by transport phenomena of sputtered atoms from the target to the substrate and by substrate surface dynamics. We study how to improve the sputtering parameters in order to obtain stoichiometric a-InAs films.

Info:

Periodical:

Edited by:

Prasad Yarlagadda and Yun-Hae Kim

Pages:

1653-1657

Citation:

Y. P. Yao and B. X. Bo, "Composition Study of Amorphous InxAs1-x Films Prepared by Radio-Frequency Sputtering", Applied Mechanics and Materials, Vols. 568-570, pp. 1653-1657, 2014

Online since:

June 2014

Export:

Price:

$41.00

* - Corresponding Author

[1] Matsmoto N and Kumabe K: Jpn. J. Appl. Phys. Vol. 18 (1979), p.1011.

[2] Matsmoto N and Kumabe K: Jpn. J. Appl. Phys. Vol. 19 (1980), p.1583.

[3] Knights J C and Lujan R A: J. Appl. Phys. Vol. 49 (1978), p.1291.

[4] Seguin J-L, Hadadi B El, Carchano H, and Aguir K: J. Non-Crystalline Solids, Vol. 238(1998), p.253.

DOI: https://doi.org/10.1016/s0022-3093(98)00689-9

[5] Gras-Marti A, Vallés-Abarca J-A, Moreno-Martin J-C: Plasmas-Surface interactions and Processing of Materials, NATO ASI Series, 1990, p.135.

DOI: https://doi.org/10.1007/978-94-009-1946-4_5

[6] Gras-Marti A, Vallés-Abarca J-A: J. Appl. Phys. Vol. 54 (1983), p.1071.

[7] Seguin J-L, Hadadi B El, Carchano H, and Aguir K: J. Non-Crystalline Solids, Vol. 183 (1995), p.175.

DOI: https://doi.org/10.1016/0022-3093(94)00564-8

[8] Blakemore J S: J. Appl. Phys. Vol. 53 (1982), p.123.

[9] He Y L, Chen G H, Zhang F Q: Amorphous Semiconductor Physics ( Higher Education Press, china 1980).