Turning of Micro-Structured Surfaces Based on a Fast Tool Servo System

Abstract:

A fast tool servo system is developed for the fabrication of micro-structured surface on a diamond turning machine. The fast tool servo (FTS) system in this investigation employs a piezoelectric actuator to actuate the diamond tool and a capacitance probe as the feed back sensor. To compensate the inherent nonlinear hysteresis behavior of the piezoelectric actuator, Proportional Integral (PI) closed loop control with a feed-forward predictor is implemented. The result of closed loop experiment in FTS demonstrates that the tracking error has been reduced to a level of less than 150nm. Actual experiment of fabricating the sinusoidal grid surface was performed on an ultra-precision diamond turning machine designed by Center of Precision Engineering of HIT. The fabrication of a sinusoidal grid surface has indicated the effectiveness of the fabrication system.

• Periodical: Applied Mechanics and Materials (Volume 684)
• Pages: 308-312
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.684.308
• Online since: October 2014
• Authors: Xiao Hui Wang*, Zhi Ding, Yu Zhen Ma
• Keywords: Fast Tool Servo, Feed-Forward Control, Hysteresis, Micro-Structured Surface

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