Development and Application of Electromagnetic Module in Multi-Fields Automatic Simulation Platform for Integrated Circuit Devices

Abstract:

According to integrated circuit (IC) devices, this study proposed a integrated automatic design platform including geometric modeling, finite element simulation analysis, experimental design etc. The platform is a software system, the development of which is driven by product design of IC device chambers. As a module of the platform, the electromagnetic fields simulation part is based on secondary development of Ansys HFSS and the Python language to transfer data, build model and analyze automatically. The validity of the electromagnetic simulation module is verified by an example of PECVD SC300 chamber.

• Periodical: Applied Mechanics and Materials (Volume 722)
• Pages: 194-197
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.722.194
• Online since: December 2014
• Authors: Ruo Fan Zhang*, Ke Zhang, Ren Cheng Wang, Jia Cheng, Yi Jia Lu
• Keywords: Automatic Simulation Platform, Electromagnetic Fields, Integrated Circuit Devices, PECVD

References

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[2] Jiang P. Research and Implementation of Electromagnetic FEM for IC Equipment Design[D]. Dalian University of Technology, (2013).