Thin Film SnO₂ and In₂O₃ Ozone Sensor Design: The Film Parameters Selection

Abstract:

In this report it is being discussed approaches for designing the SnO₂ and In₂O₃ ozone sensors based on the film parameters optimization. It was considered the influence of the conditions of the SnO₂ and In₂O₃ films deposition by spray pyrolysis method and the parameters of those films on operating characteristics of ozone sensors. Main factors, controlling operating characteristics of thin film ozone sensors were determined. Recommendations to process of the SnO₂ and In₂O₃ films deposition, promoting an attainment of optimal operating gas sensing properties, were formulated.

• Periodical: Applied Mechanics and Materials (Volumes 799-800)
• Pages: 910-914
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.799-800.910
• Online since: October 2015
• Authors: G. Korotcenkov*, V. Brinzari, B.K. Cho
• Keywords: Characterization, Film Parameters, In₂O₃ , Optimizations, Ozone Sensors, SnO₂, Spray Pyrolysis, Thin Film

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