Fluorocarbon coatings were deposited on the surface of regenerated cellulose films by RF magnetron sputtering, using polytetrafluoroethylene targets. Argon was used as the working gas. The coatings were characterized by X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, atomic force microscopy, and static contact angle and oxygen permeability measurements. It was found that the coatings were made up of the four components -CF3, -CF2-, -CF- and -C-. The [F]/[C] ratio varied with sputtering conditions. The static contact angle of the coatings was greater than 90° at lower power and higher pressure, and the substrate material was transformed from hydrophilic to hydrophobic character. The fluorocarbon coatings were porous and did not influence the oxygen permeability of the cellulose film substrates.