Experimental Research of the Anodic Bonding in the Si-Glass-Si 3-Layer Structure

Xiao Wei Liu; Jia Lu Tang; Rong Yan Chuai; He Zhang

doi:10.4028/www.scientific.net/AMM.84-85.81

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Effect of Zr Content on Properties of Mg-Zr PM Damping Alloys
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Preparation of Corundum/Mullite Composites by Sintering
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Synthesis of Ultrafine Long Afterglow Phosphor with High Brightness via Al₂O₃ Coating Route
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Analyzing Relationship between Genetic, Geographical Factors and Protein Content of Winter Wheat at Different Regional Scales
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Experimental Research of the Anodic Bonding in the Si-Glass-Si 3-Layer Structure
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Influence of Depositing Parameters on Microstructure of Ni-Co Pulse Plating
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Fine Particle Dispersion and Deposition in Three Different Square Pore Flow Structures
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Some Research on the Medical Materials
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 84-85Experimental Research of the Anodic Bonding in the...

Experimental Research of the Anodic Bonding in the Si-Glass-Si 3-Layer Structure

Abstract:

3-layer anodic bonding is one of the key technologies in the manufacture of complicated structure. The microcosmic process and current model of the 3-layer anodic bonding was investigated, and a new technology scheme with better bonding effect was developed. Using the experiment device, quantities of bonding current curves were obtained by the data collecting system. Under tensile testing device, intensity of the bonding was tested. By analysis of the data collected, the 3-layer bonding model was inspected, and the efficacy of the new technology scheme was proved.

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Periodical:

Applied Mechanics and Materials (Volumes 84-85)

Pages:

81-85

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.84-85.81

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Online since:

August 2011

Authors:

Xiao Wei Liu, Jia Lu Tang, Rong Yan Chuai, He Zhang

Keywords:

3-Layer Bonding, Anodic Bonding, Bonded Structure, Current Curve

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