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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 851Effect of Annealing on the Morphology and...

Effect of Annealing on the Morphology and Photoluminescence of ZnO Thin Films Prepared by RF Magnetron Sputtering

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Abstract:

In this work, the influence of thermal annealing on the morphologies and optical properties of zinc oxide (ZnO) thin films grown on Si and glass substrate has been investigated by scanning electron microscopy (SEM) and photoluminescence (PL) measurements. SEM images show the increase of the grain size after annealing treatment, which can be attributed to the coalescence of small grains as an effect of the increment of the energy on the surface. The observed NBE emission of PL spectra can evidence the reduction of defect-related level and improvement of crystal quality of the annealed ZnO thin films.

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Advanced Materials, Structures and Mechanical Engineering II

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Periodical:

Applied Mechanics and Materials (Volume 851)

Pages:

90-93

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.851.90

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Online since:

August 2016

Authors:

Chia Ti Wu, Yueh Chien Lee*, Yigh Pyng Lin

Keywords:

Annealing, Photoluminescence, Scanning Electron Microscopy, Zinc Oxide

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© 2016 Trans Tech Publications Ltd. All Rights Reserved

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[1] W. Water, S. Y. Chu, Physical and structural properties of ZnO sputtered films, Mater. Lett. 55 (2002) 67-72.

[2] C. X. Xu, X. W. Sun, Field emission from zinc oxide nanopins, Appl. Phys. Lett. 83 (2003) 3806.

DOI: 10.1063/1.1625774

[3] L. Miao, S. Tanemura, H. Y. Yang, S. P. Lau, Synthesis and random laser application of ZnO nano-walls: a review, J. Nanotech. 6 (2009) 723-734.

DOI: 10.1504/ijnt.2009.025310

[4] H. Q. Liang, L. Z. Pan, Z. J. Liu, Synthesis and photoluminescence properties of ZnO nanowires and nanorods by thermal oxidation of Zn precursors, Mater. Lett. 62 (2008) 1797-1800.

DOI: 10.1016/j.matlet.2007.10.010

[5] Q. Zhao, X. Y. Xu, X. F. Song, X. Z. Zhang, D. P. Yu, C. P. Li, L. Guo, Enhanced field emission from ZnO nanorods via thermal annealing in oxygen, Appl. Phys. Lett. 88 (2006) 033102.

DOI: 10.1063/1.2166483

[6] C. R. Kim, J. Y. Lee, C. M. Shin, J. Y. Leem, H. Ryu, J. H. Chang, H. C. Lee, C. S. Son, W. J. Lee, W. G. Jung, S. T. Tan, J. L. Zhao, X. W. Sun, Effects of annealing temperature of buffer layer on structural and optical properties of ZnO thin film grown by atomic layer deposition, Soid State Commun. 148 (2008).

DOI: 10.1016/j.ssc.2008.09.034

[7] H. S. Kang, J. S. Kang, S. S. Pang, E. S. Shim, S. Y. Lee, Variation of light emitting properties of ZnO thin films depending on post-annealing temperature, Mater. Sci. Eng. B 102 (2003) 313-316.

DOI: 10.1016/s0921-5107(02)00730-4

[8] K. Miyamoto, M. Sano, H. Kato, T. Yao, High-electron-mobility ZnO epilayers grown by plasma-assisted molecular beam epitaxy, J. Cryst. Growth 265 (2004) 34-40.

DOI: 10.1016/j.jcrysgro.2004.01.035

[9] T. Shimomura, D. Kim, M. Nakayama, Optical properties of high-quality ZnO thin films grown by a sputtering method, J. Lumin. 112 (2005) 191-195.

DOI: 10.1016/j.jlumin.2004.09.054

[10] W. L. Dang, Y. Q. Fu, J. K. Luo, A. J. Flewitt, W. I. Milne, Deposition and characterization of sputtered ZnO films, Superlattices Microstruct. 42 (2007) 89-93.

DOI: 10.1016/j.spmi.2007.04.081

[11] Y. C. Lee, S. Y. Hu, W. Water, K. K. Tiong, Z. C. Feng, Y. C. Huang, J. W. Lee, C. C. Huang, J. L. Shen, M. H. Cheng, Rapid thermal annealing effects on the structural and optical properties of ZnO films deposited on Si substrates, J. Lumin. 129 (2009).

DOI: 10.1016/j.jlumin.2008.09.003

[12] S. Y. Hu Y. C. Lee, J. W. Lee, J. C. Huang, J. L. Shen, W. Water, The structural and optical properties of ZnO/Si thin films by RTA treatments, Appl. Surf. Sci. 254 (2008) 1578-1582.

DOI: 10.1016/j.apsusc.2007.07.134

[13] Z. Z. Zhi, Y. C. Liu, B. S. Li, X. T. Zhang, Y. M. Lu, D. Z. Shen, X. W. Fan, Effects of thermal annealing on ZnO films grown by plasma enhanced chemical vapour deposition from Zn(C2H5)2 and CO2 gas mixtures, J. Phys. D 36 (2003) 719-722.

DOI: 10.1088/0022-3727/36/6/314

[14] Y. Lin, J. Xie, H. Wang, Y. Li, C. Chavez, S. Lee, S. R. Foltyn, S. A. Crooker, A. K. Burrell, T. M. McCleskey, Q. X. Jia, Green luminescent zinc oxide films prepared by polymer-assisted deposition with rapid thermal process, Thin Solid Films 492 (2005).

DOI: 10.1016/j.tsf.2005.06.060

[15] J. D. Ye, S. L. Gu, S. M. Zhu, F. Qin, S. M. Liu,W. Liu, X. Zhou, L. Q. Hu, R. Zhang, Y. Shi, Y. D. Zheng, Production of high-quality films by the two-step annealing method, J. Appl. Phys. 96 (2004) 5308.

DOI: 10.1063/1.1791755

[16] K. K. Kim, S. Niki, J. Y. Oh, J. O. Song, T. Y. Seong, S. J. Park, S. Fujita, S. W. Kim, High electron concentration and mobility in Al-doped -ZnO epilayer achieved via dopant activation using rapid-thermal annealing, J. Appl. Phys. 97 (2005).

DOI: 10.1063/1.1863416