Study on UV-LIGA Technology Fabrication of Micro Gear Transmission Device
With advantages of high efficiency and stable quality, UV-LIGA technology is regarded as an important developmental direction of micro forming technology. In the paper, the UV-LIGA production procedure and the processing parameters on fabrication of micro gear were determined through manufacturing experiments. The involute profile micro gear samples and the cases were fabricated based on UV-LIGA technology. The micro gears with parameters of modular m=0.04mm, tooth number z =18 were made of Nickel. The size, elastic modulus and the indentation hardness of the micro gear were measured. The results indicate that the structure of the micro gear is clear, the surface and the curve of tooth profile are smooth, and the sidewall is vertical. Micro gear transmission device was assembled by micro gear and micro case, and it can transmit continuously. The work provided some reference for the fabrication of micro gear transmission device.
Zeyong Yin, Chengyu Jiang, Datong Qin, Peixin Qiao and Geng Liu
L. Y. Zhang et al., "Study on UV-LIGA Technology Fabrication of Micro Gear Transmission Device", Applied Mechanics and Materials, Vol. 86, pp. 273-277, 2011