Surface Profile Measurement of Micro-Optics by Using a Long Stroke Atomic Force Microscope

So Ito; Ming Lei Li; Zhi Gang Jia; Yuan Liu Chen; Yuki Shimizu; Wei Gao

doi:10.4028/www.scientific.net/AMM.870.102

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 870Surface Profile Measurement of Micro-Optics by...

Surface Profile Measurement of Micro-Optics by Using a Long Stroke Atomic Force Microscope

Abstract:

In this study, a long stroke atomic force microscope (LS-AFM) has been developed for the measurement of the micro-optics which have micrometric amplitude surface structures. An electrochemically polished tungsten wire is used as the AFM probe tip. Since the effective length of the tungsten probe is more than 100 μm, the probe tip can access valley part without the interference between the steep slope and the sidewall of the probe tip. By using the long stroke PZT Z scanner whose long stroke of 70 μm and a resolution of 1 nm, micrometric amplitude of the optical elements can be measured. A linear encoder is employed to measure the displacement of Z scanner in Z direction. A well-detected result of a prism sheet film profile has been obtained by the LS-AFM and its tapping mode.

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Periodical:

Applied Mechanics and Materials (Volume 870)

Pages:

102-107

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.870.102

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Online since:

September 2017

Authors:

So Ito*, Ming Lei Li, Zhi Gang Jia, Yuan Liu Chen, Yuki Shimizu, Wei Gao

Keywords:

Large Amplitude, LS-AFM, Microstructure, Probe, Tapping Mode

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* - Corresponding Author

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