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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 870Improvement of Lateral Resolution of 3D-Relief...

Improvement of Lateral Resolution of 3D-Relief Interferometric Measurement by Deconvolution

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Abstract:

The way of the lateral resolution improvement for 3D nanorelief measurement is proposed. Algorithm for digital processing of measurement data based on deconvolution operation using Wiener filtration is presented. Results of theoretical researches, numerical and optical experiments are given.

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Measurement Technology and Intelligent Instruments XII

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Periodical:

Applied Mechanics and Materials (Volume 870)

Pages:

120-125

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.870.120

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Online since:

September 2017

Authors:

Evgeny V. Sysoev, Ignat A. Vykhristyuk*, Vasiliy V. Shirokov, Rodion V. Kulikov

Keywords:

Deconvolution, Lateral Resolution, Nanorelief Measurement

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© 2017 Trans Tech Publications Ltd. All Rights Reserved

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