Precise Diameter Measurement of a Microsphere Based on Polarization Analysis of Whispering Gallery Mode Resonance

Article Preview

Abstract:

Whispering gallery mode (WGM) resonance is used for the diameter measuring method of a microsphere smaller than φ 1 mm. It is aimed to achieve measurement accuracy better than 10 nm. There are two electromagnetic modes for WGMs, and then mis-detection of the electromagnetic mode expands measurement errors more than 100 nm, so it is indispensably to distinguish the electromagnetic mode. As theoretical simulation implies, polarization mode of WGMs can be selectively excited by controlling polarization of the incident light in optical coupling. Based on the analysis, it was proofed experimentally that the polarization of WGMs could be classified. As a result, the diameter measurement for a microsphere was performed with measurement error of ± 1 nm.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

108-113

Citation:

Online since:

September 2017

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2017 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] H. Hansen, K. Carneiro, H. Haitjema, L. De Chiffre: Dimensional micro and nano metrology, CIRP Annals -Manufacturing technology-, 55 (2) (2006) 721-743.

DOI: 10.1016/j.cirp.2006.10.005

Google Scholar

[2] R.K. Leach: Fundamental principle of engieering nanometology, Elsevier, (2009).

Google Scholar

[3] J.D. Claverley, R.K. Leach: A review of the existing performance verification infrastructure for micro-CMMs, Precision engineering, 39 (2015) 1-15.

DOI: 10.1016/j.precisioneng.2014.06.006

Google Scholar

[4] J.P. Kruth et al: Computed tomography for dimensional metrology, CIRP Annals -Manufacturing technology-, 60 (2) (2011) 821-843.

Google Scholar

[5] F. Hiersemenzel, et al; ISO compliant reference artefacts for the verification of focus varation-based optical micro-co-ordinate measuring machines, Proc. euspen International Conference (2013) 148-151.

Google Scholar

[6] M. Michihata, T. Hayashi, A. Adachi, Y. Takaya, Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes, CIRP annals, vol. 63, no. 1 (2014) 469-472.

DOI: 10.1016/j.cirp.2014.02.002

Google Scholar

[7] A. Chiasera, Y. Dumeige, P. Féron, M. Ferrari, Y. Jestin, G. Nunzi Conti, S. Pelli, S. Soria, and G.C. Righini, Spherical whispering-gallery-mode microresonators, Laser & Photon. Rev., vol. 4 (2010) 457–482.

DOI: 10.1002/lpor.200910016

Google Scholar

[8] M. Humar, M. Ravnik, S. Pajk, I. Musevic, Electrically tunable liquid crystal optical microresonators, Nature photonics, vol. 3, issue. 10 (2009) 595-600.

DOI: 10.1038/nphoton.2009.170

Google Scholar

[9] B.E. little, J.P. Laine, H.A. Haus, Analytic of coupling from tapered faibers and half-blocks into microsphere resonators, Journal of lightwave technology, vol. 17, no. 4 (1999) 704-715.

DOI: 10.1109/50.754802

Google Scholar