Square Foot Manufacturing - Concept and Design of an Electrorheological Inchworm Feed Drive

Abstract:

This scientific contribution presents a novel concept and design of a hydraulic inchworm feed drive based on an electrorheological suspension. This feed drive is ought to power Micro Machining Units (MMU) of Square Foot Manufacturing (SFM) modules. The transfer of energy is conducted by an electrorheological suspension, a field-responsive fluid that allows the use of small, rugged and simple micro valves. Both of the presented feed drive’s prototypes comprise electrorheological micro valves as primary actuators and flexible metal bellows as secondary actuators in two configurations. The combination of electrorheological micro valves with flexible metal bellows allows a very compact and sealed design that avoids dynamic seals and therefore leakages making the electrorheological inchworm feed drive suitable for a wide spectrum of motion solution including clean room applications.

• Periodical: Advanced Materials Research (Volume 1018)
• Pages: 427-432
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1018.427
• Online since: September 2014
• Authors: Andreas Breitfeld*, Holger Freyer, Pierre Conflant
• Keywords: Actuator, Micro Machining, Smart Fluid

References

[1] J. Wulfsberg, S. Grimske, P. Kohrs, N. Kong, Kleine Werkzeugmaschinen für kleine Werkstücke Zielstellung und Vorgehensweisen des DFG Schwerpunktprogramms 1476, Wt Werkstatttechnik (2010) 886-891.

DOI: 10.37544/1436-4980-2010-11-12-886

[2] J. Wulfsberg, T. Redlich, P. Kohrs, Square Foot Manufacturing: a new production concept for micro manufacturing, Production Engineering, Research and Development Vol. 4 No. 1 (2009) 75-83.

DOI: 10.1007/s11740-009-0193-x

[3] Y. Liang, Study on Micromachine tools in Fabrication of Microparts, Proceedings of the 1st International Conference on Nano/Micro Engineered and Molecular Systems (IEEE) (2006) 856-859.

DOI: 10.1109/nems.2006.334911

[4] M. Tanaka: Development of a desktop machining microfactory. In: Riken Rev. Nr. 34 (2001) 46-49.

[5] Information on http: /www. spp1476. de [11. 04. 2014].

[6] J. Huang, Modellierung, Simulation und Entwurf biomimetrischer Roboter basierend auf apedaler undulatorischer Lokomotion, Ilmenau, (2002).

[7] J. Breidenbach, Normalanatomie und – histologie des Lumbriciden Lumbricus terrestris, Münster, (2002).

[8] R. Yeh, S. Hollar, K.S.J. Pister, Single mask, large force, and large displacement electrostatic linear inchworm motors, Journal of Microelectromechanical Systems, Volume 11 Issue 4 (2002) 330-336.

DOI: 10.1109/jmems.2002.800937

[9] ERF Produktion GmbH, Product description RheOil3. 0, (2012).