The Structure Research of Micromachined Airflow Omnibearing Level Posture Sensor
The paper firstly introduced the sensitive mechanism of micromachined airflow omnibearing level posture, and compare several sense organ’s structure schematic design, and the best structure design is proposed. At last, it is testified that the design of micromachined airflow omnibearing level postrue sensor achieved the following performances: resolution<0.1°,the scope of azimuth is 360°,the scope of tile angle is 20°. The sensor is not only in small size but also in simply crafting. It is good in sensitive organ’s output consistency, and suitable for mass production.
L. H. Piao et al., "The Structure Research of Micromachined Airflow Omnibearing Level Posture Sensor", Advanced Materials Research, Vols. 108-111, pp. 1055-1060, 2010