The Research of Micromachined Airflow Omnibearing Level Posture Sensor
The paper firstly introduced the sensitive mechanism of micromachined airflow omnibearing level posture. Adopt micro-machine technology, octagonal sense organ is sensitive to omnibearing level posture. Signal processing circuit is composed by pre-signal circuit and digital circuit, to obtain voltage, omnibearing signal synthesis and resolution compensation of omnibearing tile angle signal. It is testified that: resolution<0.1°,the scope of azimuth is 360°,the scope of tile angle is 20°. The sensor is not only in small size but also in simply crafting. It is good in sensitive organ’s output consistency,and suitable for mass production.
L. H. Piao et al., "The Research of Micromachined Airflow Omnibearing Level Posture Sensor", Advanced Materials Research, Vols. 108-111, pp. 1061-1065, 2010