The Research of Micromachined Airflow Omnibearing Level Posture Sensor

Abstract:

The paper firstly introduced the sensitive mechanism of micromachined airflow omnibearing level posture. Adopt micro-machine technology, octagonal sense organ is sensitive to omnibearing level posture. Signal processing circuit is composed by pre-signal circuit and digital circuit, to obtain voltage, omnibearing signal synthesis and resolution compensation of omnibearing tile angle signal. It is testified that: resolution<0.1°,the scope of azimuth is 360°,the scope of tile angle is 20°. The sensor is not only in small size but also in simply crafting. It is good in sensitive organ’s output consistency,and suitable for mass production.

• Periodical: Advanced Materials Research (Volumes 108-111)
• Pages: 1061-1065
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.108-111.1061
• Online since: May 2010
• Authors: Lin Hua Piao, Yan Jie Li, Bai Hua Li, Ming Ming Ji, Xue Yan Zhang
• Keywords: High-Precision Omnibearing, Level Posture, Micro Machined, Sense Organ

References

[1] Zhang Fuxue sensor and actuator serial [M] Beijing : electrics industry press.

[2] Wang jinsong Wang qi , Zhao jialong the research about intelligent two axes sensor[J], sensor technology, 2001, 20(1): 1-20.

[3] Linyu Duan Chengli, Piao linhua, Zhang fuxue, structure and signal process of gas pendulum two-dimensional tilt sensor, piezoelectricity, 2006, 28(1): 33-35.

[4] Ren hongchao, Wu jianyi, Zhang fuxue, mechanism research of gas pendulum, Chinese inertia technology journal, 1998, 6(2): 45-48.