A Capacitive Ammonia Sensor Using the Commercial 0.18 μm CMOS Process

Ming Zhi Yang; Ching Liang Dai

doi:10.4028/www.scientific.net/AMR.1091.3

Paper Titles

Preface and Committee

A Capacitive Ammonia Sensor Using the Commercial 0.18 μm CMOS Process
p.3

Phosphorous Incorporated-Silicon Nanoparticles Synthesized Using Double Tube Reactor and Inductive Coupled Plasma
p.9

Spectroscopic and Morphological Investigation of Copper-Containing Nanocomposites
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Crystallite Cluster Structure Formation Resulting from Semi-Enclosed Cage Interaction in TSI-POSS/PU Hybrid Composites
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Adsorption of Sulfur’s Atoms on the Outer Surface of Carbon Nanotubes
p.25

Terbium Complex Triboluminophore for Optical Sensorics
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3-py-TTF: Efficient and Simple Colorimetric Sensor for Copper Ion in Aqueous Solutions
p.35

Research on SOFC of Composite Anode Material SrMoO₃-YSZ Impregnated with Gd_0.2Ce_0.8O_1.9 by Hard Template Method
p.39

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1091A Capacitive Ammonia Sensor Using the Commercial...

A Capacitive Ammonia Sensor Using the Commercial 0.18 μm CMOS Process

Abstract:

The project presents an ammonia sensor with heater on-a-chip manufactured using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process. The ammonia sensor is composed of a sensitive film, interdigital electrodes and a polysilicon heater. The sensor is a capacitive type and the sensitive film is ZrO₂ that is prepared by sol-gel method. The sensor requires a post-process to remove the sacrificial oxide layer and coat the ZrO₂ film on the interdigital electrodes. When the sensitive film absorbs ammonia vapor, the capacitance of the sensor generates a change. Experimental results show that the sensitivity of the ammonia sensor is 2.47 pF/ppm at 270 °C.

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Periodical:

Advanced Materials Research (Volume 1091)

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3-8

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1091.3

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Online since:

February 2015

Authors:

Ming Zhi Yang*, Ching Liang Dai

Keywords:

Ammonia Sensor, CMOS, Zro₂

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