Fabrication of High-Aspect-Ratio Structural Change Microregions in Silicon Carbide by Femtosecond Bessel Beams

Abstract:

This letter presents the morphology of femtosecond Bessel beams induced high-aspect-ratio structural change regions in bulk silicon carbide. An axion is engaged in transforming Gaussians beams to Bessel beams, which are then focused on the surface or below the surface of the sample by combination of a plano-convex lens and a microscope objective. The sample is scanned by the focused femtosecond Bessel beams at the preset patterns. Through this method, the high-aspect-ratio uniform laser induced structure change regions have been produced and the highest respect ratio can reach 206 with the depth of 330 μm, the width of 1.6 μm in optimized conditions of appropriate focusing position and pulse energy. This result is attributed to uniform energy distribution in the long propagation distance of Bessel beams with nondiffracting. This technique will have great potential applications to make high-aspect-ratio microgrooves in wide-gap and transparent materials.

• Periodical: Advanced Materials Research (Volume 1102)
• Pages: 143-147
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1102.143
• Online since: May 2015
• Authors: Liang Liang Zhao, Feng Wang*, Jun Xie, Wei Wei Zhao
• Keywords: Bessel Beams, Femtosecond Laser, High Aspect Ratio, Microstructure Fabrication

References

[1] A. Y. Vorobyev and C. L. Guo, Colorizing metals with femtosecond laser pulses, Appl. Phys. Lett. 92, 041914(2008).

DOI: 10.1063/1.2834902

[2] A. Borowiec and H. K. Haugen, Sub-wavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses, Appl. Phys. Lett. 82, 4462 (2003).

DOI: 10.1063/1.1586457

[3] C. Hnatovsky, R. S. Taylor, P. P. Rajeev, E. Simova, V. R. Bhardwaj, D. M. Rayner and P. B. Corkum, Pulse duration dependence of femtosecond-laser-fabricated nano-gratings in fused silica, Appl. Phys. Lett. 87, 014104 (2005).

DOI: 10.1063/1.1991991

[4] K. C. Vishnubhatla, J. Clark, G. Lanzani, R. Ramponi, R. Osellame, and T. Virgili, Ultrafast optofluidic gain switch based on conjugated polymer in femtosecond laser fabricated microchannels, Appl. Phys. Lett. 94, 041123 (2009).

DOI: 10.1063/1.3076120

[5] Y. Iga, T. Ishizuka, W. Watanabe, K. Itoh, Y. Li and J. Nishii, Characterization of micro-channels fabricated by in-water ablation of femtosecond laser pulses, Jpn. J. Appl. Phys. 43 4207 (2004).

DOI: 10.1143/jjap.43.4207

[6] Q. Sun, A. Saliminia, F. Théberge, R. allée and S. Leang, Microchannel fabrication in silica glass by femtosecond laser pulses with different central wavelengths, J. Micromech. Microeng. 18, 035039 (2008).

DOI: 10.1088/0960-1317/18/3/035039

[7] W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R, Dändliker, and N. Rooij, IEEE J. Sel. Top. Quantum Electron. 8, 148 (2002).

DOI: 10.1109/2944.991410

[8] W. Ong, J. Kee, A. Ajay, N. Ranganathan, K. Tang, and L. Yobas, Buried microfluidic channel for integrated patch-clamping assay, Appl. Phys. Lett. 89(9), 093902 (2006).

DOI: 10.1063/1.2336213

[9] Y. Ma, H. T. Shi, J. H. Si, H. Ren, T. Chen, F. Chen and X. Hou, High-aspect-ratio grooves fabricated in silicon by a single pass of femtosecond laser pulses, J. Appl. Phys. 111, 093102 (2012).

DOI: 10.1063/1.4709726

[10] A. Pan, J .H. Si, T. Chen, Y. C. Ma, F. Chen, and X. Hou, Fabrication of high-aspect-ratio grooves in silicon using femtosecond laser irradiation and oxygen-dependent acid etching, Opt. Express 21, 16657 (2013).

DOI: 10.1364/oe.21.016657

[11] Y. Ma, A. Pan, J. H. Si ,T. Chen, F. Chen, X. Hou, A simple method for fabrication of high-aspect-ratio all-silicon grooves, Appl. Surf. Sci. 284, 372 (2013).

DOI: 10.1016/j.apsusc.2013.07.107

[12] D. J. Young, J. G. Du, C. A. Zorman, and H. K. Wen, High-temperature single-crystal 3C-SiC capacitive pressure sensor, IEEE Sens. J. 4, 464 (2004).

DOI: 10.1109/jsen.2004.830301

[13] C. A. Zorman, S. Rajgopal, X. A. Fu, R. Jezeski, J. Melzak and M. Mehregany, Deposition of polycrystalline 3C-SiC films on 100 mm diameter Si (100) wafers in a large-volume LPCVD furnace, Electrochem. Solid-State Lett. 5, 10 (2002).

DOI: 10.1149/1.1506461

[14] M. Östling, S. M. Koo, C. M. Zetterling, S. Khartsev, A. Grishin, Ferroelectric thin films on silicon carbide for next-generation nonvolatile memory and sensor devices, Thin solid films 469, 444 (2004).

DOI: 10.1016/j.tsf.2004.09.030

[15] M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, High aspect ratio nanochannel machining using single shot femtosecond Bessel beams., Appl. Phys. Lett. 97, 081102 (2010).

DOI: 10.1063/1.3479419

[16] M. K. Bhuyan, F. Courvoisier, H. S. Phing, Laser micro- and nanostructuring using femtosecond Bessel beams, Eur. Phys. J. Special Topics 199, 101 (2011).

DOI: 10.1140/epjst/e2011-01506-0

[17] J. Durnin, J. J. Miceli, and J. H. Eberly, Holographic generation of diffraction-free beams, Phys. Rev. Lett. 58, 1499 (1987).

DOI: 10.1103/physrevlett.58.1499

[18] F. Courvoisier, P. A. Lacourt, M. Jacquot, M. K. Bhuyan, Surface nanoprocessing with nondiffracting femtosecond Bessel beams., Opt. Lett. 34, 3163 (2009).

DOI: 10.1364/ol.34.003163

[19] K. Vanthanh, Y. C. Ma, J. H. Si, T. Chen, F. Chen, X. Hou, Fabrication of Mmicro-grooves in silicon carbide using femtosecond laser irradiation and acid etching, Chin. Phys. Lett. 3, 037901 (2014).

DOI: 10.1088/0256-307x/31/3/037901