Infuence of Nitrogen Gas Flow Rate on Nitrogenated Amorphous Carbon Film for Solar Cell Applications

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In this paper, the effect of nitrogen gas flow rate on electrical and electronic properties of nitrogen doped amorphous carbon film (a-C:N) by the use of constant +50 V is presented. The flow-rate of nitrogen gas into the furnace was influenced the resistivity as well as conductivity a-C:N film. The resistivity and conductivity of a-C:N films deposited at high nitrogen flow-rate (200 mL/min) produced low resistivity and high conductivity under deposition condition used. The highest resistivity (4.97x107 Ω.cm) and lowest resistivity (2.81x101 Ω.cm) is found at 0 mL/min (undoped) and 200 mL/min. The fabricated solar cell device with the configuration of Au/n-C:N/p-Si/Au for undoped (0 mL/min) and nitrogen doped (200 mL/min) achieved efficiency (𝜂) 0.00111% and 0.00120 %, respectively.

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138-142

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June 2015

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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